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A面(11-20)蓝宝石晶片

a plane 11 20 sapphire wafers

A面(11-20)蓝宝石晶片具有均匀的介电常数和高绝缘特性,因此通常用于混合微电子应用,A-plane也可用于高超导体的生长。

例如:TlBaCaCuO(TbBaCaCuO)、Tl-2212,在蓝宝石氧化铈(CeO2)复合衬底上生长异质外延超导薄膜等。

a-plane-11-20-sapphire-wafers
Specifications of A面(11-20)蓝宝石晶片
Item 2-inch A-plane(11-20) 430μm Sapphire Wafers
Crystal Materials 99,999%, High Purity, Monocrystalline Al2O3
Grade Prime, Epi-Ready
Surface Orientation A-plane(11-20)
Diameter 50.8 mm +/- 0.1 mm
Thickness 430 μm +/- 25 μm
Primary Flat Orientation C-plane(0001) +/- 0.2°
Primary Flat Length 16.0 mm +/- 1.0 mm
Single Side Polished Front Surface Epi-polished, Ra < 0.5 nm (by AFM)
(SSP) Back Surface Fine ground, Ra = 0.8 μm to 1.2 μm
Double Side Polished Front Surface Epi-polished, Ra < 0.5 nm (by AFM)
(DSP) Back Surface Epi-polished, Ra < 0.5 nm (by AFM)
TTV < 10 μm
BOW < 10 μm
WARP < 10 μm
Cleaning / Packaging Class 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

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2024-12-29 23:19:18
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